| 摘要 |
PURPOSE: A manufacturing method of trichlorosilane is provided to inexpensively manufacture trichlorosilane by decreasing the generation of by-products while increasing the yields of the trichlorosilane. CONSTITUTION: A manufacturing method of trichlorosilane includes a step for reacting metallic silicon and anhydrous hydrochloride using a cadmium group catalyst as a main catalyst or a co-catalyst. The amount of cadmium group catalyst used is 0.01 wt% ~ 10 wt% of metallic silicon. A metal catalyst is used as the main catalyst. The cadmium group catalyst is used as the co-catalyst. The metal catalyst is selected from a group consisting of Al, Cu, Li, Fe, Co, Ni, Pd, Pt, or selected from a combination of the previously mentioned metals. |
