发明名称 A BONDING STAGE OF WIRE BONDER CAPABLE OF IMPROVING A PRODUCTIVITY AND MANUFACTURING METHOD OF SEMICONDUCTOR PACKAGE USING THE SAME
摘要 PURPOSE: A bonding stage of a wire bonder capable of improving productivity and a manufacturing method of a semiconductor package using the same are provided to improve the efficiency of a production process by preventing unnecessary semiconductor chips from being attached to a matrix substrate. CONSTITUTION: A bottom body(310) for the bonding stage comprises at least a vacuum passages therein. A porous substrate(320) is installed on the bottom body of the bonding stage. A top of bonding state(330) is installed on the porous substrate and is combined with the bottom body of the bonding stage. A plurality of vacuum holes(332) adsorbing one semiconductor chip are installed in a matrix type. A wire bonder is used for the BOC(Board On Chip) package assembly. The porous substrate selects one of a ceramic particle and a metal particle.
申请公布号 KR20100010305(A) 申请公布日期 2010.02.01
申请号 KR20080071223 申请日期 2008.07.22
申请人 STS SEMICONDUCTOR & TELECOMMUNICATIONS CO., LTD. 发明人 JUNG, SUNG YUN;LEE, JAE JIN;KIM, DUK KYOO;CHOI, SUN JOUNG;CHO, GWON SIK
分类号 H01L21/60 主分类号 H01L21/60
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