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发明名称
METHOD AND COMPOSITION FOR POLISHING A SUBSTRATE
摘要
申请公布号
KR100939595(B1)
申请公布日期
2010.02.01
申请号
KR20087005391
申请日期
2006.08.03
申请人
发明人
分类号
H01L21/304;B23H5/00;B23H5/08
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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