摘要 |
<p>[Problems] To downsize a gas supply valve and also decrease a delay in start or suspension of blowing gas flow. [Means for Solving Problems] A gas supply valve 10 of the present invention including a gas introduction path 11c for introducing a gas, a valve cylinder 12 to which an inlet opening Ile of the gas introduction path faces internally, a valve body 15 equipped with a blocking portion 15a which constitutes the inlet opening so as to be opened and closed inside the valve cylinder, gas lead-out paths 12c and 11g equipped with an outlet opening 12d which face to the inside of the valve cylinder, and a piezoelectric actuator 19 for driving the valve body to open and close the inlet opening, wherein at least when the valve is opened, aeration channels 12e, 12f, and 11j for communicating an internal space between the inlet opening and the outlet opening with the outside are provided separately from the gas introduction path and the gas lead-out path.</p> |