METAL CORE ROD WITH DIFFUSION BARRIER MATERIALS FOR PRODUCTION SYSTEM OF POLYSILICON

摘要

PURPOSE: A metal core rod with an impurity barrier film used in an apparatus of producing polycrystalline silicon is provided to produce polycrystalline silicon of high purity while maintaining the properties of the metal core, and to prevent contamination of the silicon due to metal core rod. CONSTITUTION: A metal core rod(1) has an impurity barrier(2) which is formed to an amorphous shape. The impurity barrier includes boron-nitride or carbon-nitride. The impurity barrier further includes two or more elements selected among silicon, molybdenum, tungsten, iron, nickel, aluminum, zirconium, platinum, chrome, vanadium, and rhenium. The metal core rod includes tungsten molybdenum alloy.