发明名称 Nitride semiconductor light-emitting device and method for fabrication thereof
摘要 A nitride semiconductor light-emitting device includes a substrate and a nitride semiconductor layer including a light-emitting layer stacked on the substrate, wherein a normal line relative to a lateral face of the nitride semiconductor layer is not perpendicular to a normal line relative to a principal plane of the substrate. A method for the production of a nitride semiconductor light-emitting device that includes a substrate and a nitride semiconductor layer including a light-emitting layer stacked on the substrate includes the steps of covering a first surface of the nitride semiconductor layer with a mask provided with a prescribed pattern, removing the nitride semiconductor layer in regions to be divided into component devices till the substrate, subjecting the nitride semiconductor layer to wet-etching treatment and dividing the nitride semiconductor layer into the component devices.
申请公布号 US7652299(B2) 申请公布日期 2010.01.26
申请号 US20060352336 申请日期 2006.02.13
申请人 SHOWA DENKO K.K. 发明人 URASHIMA YASUHITO;KUSUNOKI KATSUKI
分类号 H01L33/00 主分类号 H01L33/00
代理机构 代理人
主权项
地址