| 摘要 |
The present invention provides a susceptor including a plate member having an upper surface on which a substrate is placed and a lower surface, a base member bonded to the lower surface of the plate member with a bonding layer, and an annular protective member disposed in an annular recess formed along a rim of a bonding portion of the plate member and the base member, in which a space is formed between the lower surface of the plate member and an upper surface of the protective member and/or between an upper surface of the base member and a lower surface of the protective member. The susceptor can inhibit generation of particles resulting from plasma corrosion, and can suppress extensive leakage of gas from a space or a gap between the plate member and a substrate.
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