发明名称 Device for applying electromagnetic microwave radiation in a plasma cavity
摘要 A device for applying, in use, electromagnetic microwave radiation in a plasma cavity. The device includes a plasma cavity present within a housing, being substantially cylindrically symmetric about a first axis, and which plasma cavity includes a cylindrical wall provided with a circumferential slit. The plasma cavity is in communication, via the slit, with a first end of an elongated microwave guide having a longitudinally extending second axis. The device is in communication in use with a microwave generating device via the other end of the microwave guide, in which the electromagnetic microwave radiation being generated may include several modes, where the device can, in use, generate microwave radiation in the slit, which microwave radiation has only one electromagnetic field distribution at least in one direction perpendicularly to the propagation direction of the microwave radiation in the microwave guide.
申请公布号 US7650853(B2) 申请公布日期 2010.01.26
申请号 US20020307975 申请日期 2002.12.03
申请人 DRAKA FIBRE TECHNOLOGY B.V. 发明人 VAN STRALEN MATTHEUS JACOBUS NICOLAAS;SIMONS DENNIS ROBERT
分类号 C23C16/00;H05H1/46;C03C17/02;C23C16/04;C23C16/511;C23F1/00;H01J37/32;H01L21/306 主分类号 C23C16/00
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