SUBSTRATE TRANSFERRING METHOD

摘要

PURPOSE: A method for transferring a substrate is provided to reduce a substrate transfer time by transferring a plurality of substrates to the buffer unit after successively drawing out the plurality of substrates from a process chamber. CONSTITUTION: A list of processed wafers which are completed is generated(S110). A wafer with a first slot number is searched in a list(S120). A first pickup hand picks up the wafer with a first slot number(S130). A second pickup hand picks up the wafer with a second slot number(S150). A third pickup hand picks up the wafer with the third slot number(S180). A main transfer robot transfers the wafers picked up by the first to third pickup hands to the buffer unit at the same time(S210). The wafer with a first slot number is the oldest wafer in the list.