发明名称 |
Integrated compound nano probe card |
摘要 |
An integrated compound nano probe card is disclosed to include a substrate layer having a front side and a back side, and compound probe pins arranged in the substrate layer. Each compound probe pin has a bundle of aligned parallel nanotubes/nanorods and a bonding material bonded to the bundle of aligned parallel nanotubes/nanorods and filled in gaps in the nanotubes/nanorods. Each compound probe pin has a base end exposed on the back side of the substrate layer and a distal end spaced above the front side of the substrate layer. |
申请公布号 |
US7652492(B2) |
申请公布日期 |
2010.01.26 |
申请号 |
US20080071311 |
申请日期 |
2008.02.20 |
申请人 |
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
WANG HORNG-JEE;HUANG YA-RU;CHOU MIN-CHIEH |
分类号 |
G01R31/02;G01R1/067;G01R1/073;G01R3/00 |
主分类号 |
G01R31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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