SUBSTRATE PROCESSING APPARATUS AND METHOD FOR TRANSFERRING SUBSTRATE OF THE SAME

摘要

PURPOSE: A substrate processing apparatus and a method for transferring the substrate are provided to improve work efficiency by transferring a plurality of wafers between a buffer unit and a reception container at the same time. CONSTITUTION: A plurality of slots are formed on a reception container. A plurality of substrates are respectively inserted into a plurality of slots. A process chamber(600) provides a substrate process space. A buffer unit(300) keeps the substrates injected into the process chamber and the reception container. The buffer unit has a plurality of supports. An interval between a pair of supports among the plurality of supports is equal to the interval between the slots. A first transfer robot(200) transfers the substrate between the reception container and the buffer unit. A second transfer robot(500) transfers the substrate between the buffer unit and the process chamber.