| 摘要 |
A hard film contains [(Nb1-d,Tad)aAl1-a](C1-xNx), [(Nb1-d,Tad)a,Al1-a-b-c,Sib,Bc](C1-xNx), [(Cr,V)p(Nb,Ta)q(Al,Si,B)r](C1-xNx), or [(Ti,Cr,V)p(Nb,Ta)q(Al,Si,B)r](C1-xNx), in which the atomic ratios satisfy the following conditions: 0.4<=a<=0.6, 0<b+c<=0.15, 0<=d<=1, 0.4<=x<=1, provided that one of "b" and "c" may be zero but both of them are not simultaneously zero, p+q+r=1; pTi+pCr+pV=p; qNb+qTa=q; rAl+rsi+rB=r, 0.05<=q, 0.5<=r<=0.73, 0<=rsi+rB<=0.15, and 0.4<=x<=1.0, provided that when pTi is greater than zero, the total of pCr, pV, rSi, and rB is greater than zero.
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