发明名称 Method for manufacturing antenna and method for manufacturing semiconductor device
摘要 The present invention provides an antenna with low resistance and a semiconductor device having an antenna whose communication distance is improved. A fluid containing conductive particles is applied over an object. After curing the fluid containing the conductive particles, the fluid is irradiated with a laser to form an antenna. As a method for applying the fluid containing the conductive particles, screen printing, spin coating, dipping, or a droplet discharging method is used. Further, a solid laser having a wavelength of 1 nm or more and 380 nm or less is used as the laser.
申请公布号 US7651932(B2) 申请公布日期 2010.01.26
申请号 US20060433546 申请日期 2006.05.15
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 AOKI TOMOYUKI;YAMADA DAIKI
分类号 H01L21/20;H01L21/36 主分类号 H01L21/20
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