| 摘要 |
Disclosed are a hard film and a method useful for manufacturing the hard film wherein the hard film is obviously excellent in wear resistance, and exhibits excellent oxidation resistance even under a condition where hot heat generation tends to occur due to friction heating, consequently exhibits excellent properties compared with a usual hard-film including TiAlN, TiCrAIN, TiCrAISiBN, CrAlSiBN, or NbCrAISiBN. The hard film includes (M) a Cr b Al c Si d B e Y f Z (however, M is at least one element selected from a group 4A element, a group 5A element, and a group 6A element (except for Cr) in the periodic table, and Z shows one of N, CN, NO and CNO), wherein a + b + c + d + e + f = 1 , and
(a, b, c, d, e and f show atomic ratios of M, Cr, Al, Si, B and Y respectively). |
