发明名称 METHOD FOR FABRICATING A PATTERN STRUCTURE AND THE PATTERN STRUCTURE THEREOF
摘要 PURPOSE: A method for fabricating a pattern structure and the pattern structure thereof are provided to manufacture efficiently the pattern structure. CONSTITUTION: In the master image, the pattern part(200) which is blacked is manufactured. The material layer(320) is combined about master with the bonding material in the patterned portion direction. The pattern unit comprises the plating part and blackening part. The part of the material layer and binder layer(310) serves as the protective layer or the support layer role of the pattern unit. The protective layer is separated from master. The pattern unit is transferred to the protection layer. The pattern structure is manufactured.
申请公布号 KR20100008490(A) 申请公布日期 2010.01.26
申请号 KR20080069002 申请日期 2008.07.16
申请人 INDUCE TECHNOLOGY INC. 发明人 LEE, JONG GI;NA, GEONG LOCK
分类号 H01L21/027 主分类号 H01L21/027
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