发明名称 |
Apparatus and method for manufacturing an organic electroluminescence display |
摘要 |
An apparatus for manufacturing an organic electroluminescence display having an alignment chamber for aligning a mask having openings corresponding to a predetermined pattern with a substrate on which a first electrode layer is formed and detachably attaching the mask and the substrate. The apparatus further including a number of vacuum processing chambers for sequentially forming a number of organic material layers on the substrate attached with the mask. The apparatus also including a transfer robot for transferring the attached mask and substrate to one of the number of vacuum processing chambers and sequentially transferring it between the number of the vacuum processing chambers.
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申请公布号 |
US7651722(B2) |
申请公布日期 |
2010.01.26 |
申请号 |
US20020153453 |
申请日期 |
2002.05.21 |
申请人 |
SONY CORPORATION |
发明人 |
MORI TAKAO;YAMAGUCHI MASARU;KAMIYAMA ISAO |
分类号 |
B05D5/06;H05B33/10;C23C14/02;C23C14/04;C23C14/12;C23C14/56;C23C16/00;G09F9/00;G09F9/30;H01L27/12;H01L27/32;H01L51/00;H01L51/40;H01L51/50;H01L51/56;H05B33/12;H05B33/22 |
主分类号 |
B05D5/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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