INFORMATION MANAGING METHOD, INFORMATION MANAGING APPARATUS AND SUBSTRATE PROCESSING SYSTEM

摘要

PURPOSE: An information managing method, information managing apparatus and substrate processing system are provided to reduce the time required to search when acquiring the information from the information management apparatus. CONSTITUTION: The present information storage(402) memorizes each substrate processor. The apparatus information DB(400) memorizes the device information and time about each substrate processing apparatus to be connected. The communications unit(406) performs communications with the substrate processing apparatus. According to the accumulation condition of the definition information storage(404), the apparatus information registering part(410) registers presently the device information of the information storage in the apparatus information DB.