| 摘要 |
PURPOSE: A substrate drying apparatus is provided to improve effect of drying a substrate by removing washing solution attached on the surface of the substrate. CONSTITUTION: A first and a second injection pipe(2,4) are respectively installed on the upper and the lower part of a substrate(P) to be extended at a right angle to the transferring direction of the substrate. An air pressure generator supplies air pressure to the first and the second injection pipe. A first nozzle hole(8) is formed at the leading end of the first injection pipe. The second nozzle hole(10) is formed at the front end of the second injection pipe. A separation distance(L) along the transfer line of the substrate of first and second nozzle hole is 2~10mm.
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