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发明名称
摘要
申请公布号
FR2062925(A7)
申请公布日期
1971.07.02
申请号
FR19700033697
申请日期
1970.09.17
申请人
HITACHI LTD
发明人
分类号
H01L21/764;C30B25/00;H01L21/00;H01L21/18;H01L21/205;H01L21/306;H01L21/331;H01L29/73;(IPC1-7):H01L7/00;H01L11/00
主分类号
H01L21/764
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