| 摘要 |
PURPOSE: A mask and method for manufacturing the same is provided to reduce the flare noise [flare noise] between the main pattern and dummy pattern. CONSTITUTION: The mask(400) comprises the main pattern (A), and a plurality of the dummy pattern (B,C) and light blocking film. The main pattern is formed on the reticle substrate. A plurality of dummy patterns is separated from the main pattern in the predetermined distance (H). A plurality of dummy patterns is arranged on the reticle substrate. The light blocking layer is formed among a plurality of dummy patterns. The main pattern and dummy patterns is MoSi. The light shield layer is Cr. |
