| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor acceleration sensor where a semiconductor sensor element will not break, even if at least a part of a spindle is arranged in the inner space of the semiconductor sensor element and the weight of the spindle is increased. <P>SOLUTION: Four trapezoidal inclined planes 13 of substantially the same shape are combined annularly so as to imitate the outer peripheral surface of truncated pyramid space, thereby constituting the inner peripheral surface of a support section 9. The spindle 3 is constituted to have linear abutting sections 3d, abutting against the inclined planes 13 of the inner peripheral surface of a support section 9 when the spindle 3 displaces maximally to a flexible part 11 side. The abutting sections 3d have a shape, where the contour shape seen from the side, having a spindle fixing section 7 becomes a circular shape. The inclined planes 13 of the support section 9 and the abutting sections 3d of the spindle 3 constitute a stopper structure which regulates the range of the displacement of the spindle 3 to the flexible part 11 side. <P>COPYRIGHT: (C)2010,JPO&INPIT |
