CONTROL LOOP FOR TWO-DIMENSIONAL TABLE MINUTE ANGLE DRIVE MECHANISM

摘要

PROBLEM TO BE SOLVED: To solve a problem that a drive error occurs by resonance of first-fourth hinges because the resonance of the first-fourth hinges is not taken into consideration for a control loop for a conventional tow-dimensional table minute angle drive mechanism. SOLUTION: A control loop for a two-dimensional table minute angle drive mechanism is configured such that a compensation operating means 800 interposed between a second subtraction part 300 and a second multiplication part 400, and comprising a first compensation multiplication part 810, a first integration part 820, a second compensation multiplication part 830, a second integration part 840, and an addition part 850 generates a compensation angular velocity deviation 850a using a resonance frequencyω0of a mechanism part 700 and a dumping ratioζ. COPYRIGHT: (C)2010,JPO&INPIT