| 摘要 |
A monitor position determining apparatus includes an acquiring unit that acquires design data concerning circuit elements arranged in a layout of a semiconductor device and for each of the circuit elements, yield sensitivity data indicative of a percentage of change with respect to a yield ratio of the semiconductor device; a selecting unit that selects, based on the yield sensitivity data, a circuit element from a circuit element group arranged in the layout; a determining unit that determines an arrangement position in the layout to be an installation position of a monitor that measures a physical amount in the semiconductor device in a measurement region, the arrangement position being of the circuit element that is specified from the design data acquired by the acquiring unit and selected by the selecting unit; and an output unit that outputs the installation position determined by the determining unit.
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