发明名称 SPUTTER TARGET ASSEMBLY HAVING A LOW-TEMPERATURE HIGH-STRENGTH BOND
摘要 Sputter target assemblies are disclosed, wherein the target and the backing plate are joined together through brazing at low temperatures to produce a superior bond between the target and the backing plate.
申请公布号 US2010012488(A1) 申请公布日期 2010.01.21
申请号 US20080173557 申请日期 2008.07.15
申请人 KOENIGSMANN HOLGER J;LO CHI-FUNG;GILMAN PAUL S 发明人 KOENIGSMANN HOLGER J.;LO CHI-FUNG;GILMAN PAUL S.
分类号 C23C14/00;B32B37/00 主分类号 C23C14/00
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