发明名称 |
VERFAHREN UND VORRICHTUNG ZUM STABILISIEREN EINES GLÜHENTLADUNGSPLASMAS UNTER ATMOSPHÄRISCHEN BEDINGUNGEN |
摘要 |
Method and apparatus for generating and sustaining a glow discharge plasma in a plasma discharge space comprising at least two spaced electrodes. The method and apparatus are arranged for performing the steps of introducing in the discharge space a gas or gas mixture under atmospheric pressure conditions, energizing the electrodes by applying an AC energizing voltage (Va) to the electrodes, and controlling the energizing voltage (Va) such that at plasma generation a sharp relative decrease of displacement current is provided. <IMAGE> |
申请公布号 |
DE602004024575(D1) |
申请公布日期 |
2010.01.21 |
申请号 |
DE20046024575T |
申请日期 |
2004.12.22 |
申请人 |
FUJIFILM MANUFACTURING EUROPE B.V. |
发明人 |
ALDEA, EUGEN;BOUWSTRA, JAN BASTIAAN;VAN DE SANDEN, MAURITIUS CORNELIUS;DE VRIES, HINDRIK WILLEM |
分类号 |
H01J37/32;H05H1/24 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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