| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an etching tape for manufacturing an array substrate for a liquid crystal display device. <P>SOLUTION: The etching tape 100 includes a base sheet 110, and an etching material layer 120 in which a gel type etching material is applied and formed on the base sheet. The etching tape is utilized for a method of manufacturing the array substrate for the liquid crystal display device. The method includes: a step of forming a gate electrode, a first electrode of a storage capacitor and a gate interconnect line on a transparent insulating substrate; a step of forming a gate insulating film, an active layer, an ohmic contact layer, a source electrode and a drain electrode, forming a dielectric layer and a second electrode of a storage capacitor, and forming a data interconnect line; a step of forming a pixel electrode, forming a gate pad electrode and forming a data pad electrode; a step of forming a protective layer; and a step of forming a contact hole by etching the protective layer formed on the gate pad electrode and the protective layer formed on the data pad electrode by using the etching tape. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
