RANGE FINDER, RANGE FINDING METHOD, AND OPTICAL THREE-DIMENSIONAL SHAPE MEASURING MACHINE

摘要

PROBLEM TO BE SOLVED: To provide a range finder and a range finding method capable of measuring a long distance highly accurately in a short time. SOLUTION: An interference signal acquired by detecting by a reference light detector 3, interference light S3between reference light S1emitted from a first light source 1 and irradiated onto a reference surface 4 and measuring light S2emitted from a second light source 2 and irradiated onto a measuring surface 6, and an interference signal acquired by detecting by a measuring light detector 6, interference light S4between reference light S1' reflected by the reference surface 4 and measuring light S2' reflected by the measuring surface 5, are supplied to a signal processing part 7. Then, a difference between a distance to the reference surface and a distance to the measuring surface is determined from the velocity of light and a refractive index in a measured wavelength based on a time difference between the interference signal acquired by detecting the interference light S3and the interference signal acquired by detecting the interference light S4by the signal processing part 7. COPYRIGHT: (C)2010,JPO&INPIT