FLAW INSPECTION DEVICE AND FLAW INSPECTION METHOD

摘要

<P>PROBLEM TO BE SOLVED: To accurately grasp a flaw on each film or in each film by accurately controlling a focus position in the inspection of the flaw in a laminated film constitution. Ž<P>SOLUTION: A flaw inspection device (1) includes a refractive index measuring means (10) for measuring the refractive index on a wafer, a flaw detecting optical system (20) for acquiring the image data of the wafer to detect the flaw of the wafer and a control part (45) for classifying the measured refractive index at every film kind and determining the focus position of a flaw imaging optical system from designed deposition information. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž