Method for manufacturing micromechanical structure, involves applying sacrificial layer on substrate, applying sacrificial layer on function layer, and applying another sacrificial layer on function layer

摘要

The method involves applying a sacrificial layer on a substrate (1), applying the sacrificial layer on a function layer (3), and applying another sacrificial layer on the function layer. A surface layer is applied on the latter sacrificial layer. The latter sacrificial layer is structured, where the surface layer and the function layer are corroded together. The function layer or the surface layer is made of silicon, where a poly-silicon activation layer is applied on the latter sacrificial layer, on which poly-silicon layer is separated. An independent claim is included for a micromechanical structure, which has a substrate and sacrificial layer.