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经营范围
发明名称
UNG
摘要
申请公布号
DE60140749(D1)
申请公布日期
2010.01.21
申请号
DE20016040749
申请日期
2001.07.10
申请人
TEL EPION INC.
发明人
ALLEN, LISA P.;FENNER, DAVID B.
分类号
H01J27/20;H01J37/305;H01J37/08;H01J37/30;H01J37/317;H01L21/00;H01L21/302;H01L21/3065;H01L21/3213
主分类号
H01J27/20
代理机构
代理人
主权项
地址
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