OPTICAL WAVEGUIDE SUBSTRATE WITH OPTICAL FIBER FIXATION GROOVE, PROCESS FOR ITS PRODUCTION, STAMP FOR USE IN THIS PRODUCTION PROCESS, AND OPTO-ELECTRONIC HYBRID INTEGRATED MODULE INCLUDING THE OPTICAL WAVEGUIDE SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide an optical waveguide substrate with an optical fiber fixation groove or the like, in which an optical fiber fixation groove and an optical waveguide can be formed with dimensional precision on an optionally selected base substrate and in which no accurate alignment is needed between the core of an optical fiber and the core layer of the optical waveguide. SOLUTION: The optical waveguide substrate with the optical fiber fixation groove includes the optical waveguide which contains a lower cladding layer on a base substrate, wherein the lower cladding layer has an optical fiber fixation groove and a core groove, and a weir is provided between the optical fiber fixation groove and the core groove. The optical waveguide substrate with an optical fiber fixation groove is produced by forming a lower cladding layer on a base substrate using a male stamp produced from a female stamp and then successively forming a core layer and an upper cladding layer thereon. The stamp for use in such a production process includes concave portions or convex portions, corresponding to the optical fiber fixation groove and the core groove, as well as a convex portion or a concave portion corresponding to the weir. An opto-electronic hybrid integrated module includes the optical waveguide substrate with an optical fiber fixation groove. COPYRIGHT: (C)2010,JPO&INPIT