| 摘要 |
PROBLEM TO BE SOLVED: To provide a minute movable device capable of preventing a movable section from sticking on a support substrate caused by electrification. SOLUTION: The minute movable device has a three-layered structure in which a middle insulating layer 12 is sandwiched by the conductive support substrate 11 and a device layer 13, a fixed section 33 and a movable section M connected with and supported on the fixed section 33 both formed on the device layer 13, and the movable section M electrostatically driven in a plane direction parallel with a plane surface of the support substrate 11, wherein a hole 51 penetrating the middle insulating layer 12 from the device layer 13 and reaching the support substrate 11 is formed in the fixed section 33, and a conductive material (conductive resin 52) for conducting the device layer 13 and the support substrate 11 is housed inside the hole 51. COPYRIGHT: (C)2010,JPO&INPIT |
