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经营范围
发明名称
ETCHING METHOD
摘要
申请公布号
US3598710(A)
申请公布日期
1971.08.10
申请号
USD3598710
申请日期
1966.04.04
申请人
INTERNATIONAL BUSINESS MACHINES CORP.
发明人
PIETER D. DAVIDSE
分类号
C23F4/00;H01J37/34;H01L21/033;H01L21/306;H01L21/3065;H01L21/311;H01L23/29;H01L23/485;(IPC1-7):C23C15/00
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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