| 发明名称 |
SUBSTRATE TREATMENT EQUIPMENT AND SUPPORTING FRAME USED FOR THE EQUIPMENT |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To effectively utilize the lower space of a scaffolding used for maintenance work for substrate treatment equipment. <P>SOLUTION: The scaffolding 160 is fitted directly so as to protrude to the outside from peripheries of treatment chambers at a site at a fixed height from a floor to a support frame 140 arranged on the floor for supporting the substrate treatment equipment 100 by a plurality of treatment chambers 110. The scaffolding has a plurality of support brackets 162 fitted to the outside of the supporting frame and scaffolding boards 164 horizontally supported to the support brackets. <P>COPYRIGHT: (C)2010,JPO&INPIT |
| 申请公布号 |
JP2010016144(A) |
申请公布日期 |
2010.01.21 |
| 申请号 |
JP20080174128 |
申请日期 |
2008.07.03 |
| 申请人 |
TOKYO ELECTRON LTD |
发明人 |
YAMADA SHUNICHI;SHIMO KENICHI;NAKAGOME YOICHI |
| 分类号 |
H01L21/02;H01L21/027;H01L21/304 |
主分类号 |
H01L21/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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