| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To efficiently operate carrier vehicles while preventing collision between the carrier vehicles, in a carrying system for carrying, on a track including a merge point, objects such as a container containing various kinds of substrates for semiconductor device production. <P>SOLUTION: This carrying system (100) has: a track (1); a plurality of carrier vehicles (3); and an entry control means (7, 9) outputting a no-entry signal to prohibit a carrier vehicle from entering a predetermined area including a merge point on the track, when the other one of the plurality of carrier vehicles enters the area through a part of the track, through the other part of the track. When a failure to stop the carrier vehicle occurs when the no-entry signal is output, the entry control means decides whether the other carrier vehicle collides with the one carrier vehicle or not based on a stop position of the one carrier vehicle. When it is decided that the other carrier vehicle does not collide with the one carrier vehicle, the entry control means releases the no-entry signal. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
