VERFAHREN UND ANORDNUNG ZUM ENTFERNEN VON VERUNREINIGUNGEN VON EINER SUBSTRATOBERFLÄCHE UNTER VERWENDUNG EINES ATMOSPHÄRENDRUCK-GLÜHPLASMAS

摘要

The present invention relates to a method of and arrangement for removing contaminants from a surface of a substrate by subjecting said substrate surface to an atmospheric pressure glow plasma. Said plasma is generated in a discharge space comprising a plurality of electrodes, by applying an alternating plasma energizing voltage to said electrodes causing a plasma current and a displacement current. Said plasma is stabilised by controlling said displacement current during plasma generation such that modification of properties of said substrate surface is prevented.