发明名称 Prüfgerät
摘要 Provided is a test apparatus that tests a device under test, including a first pipeline that sequentially propagates pieces of pattern data included in a first test pattern, according to a first test period, and outputs the resulting data to the device under test; a second pipeline that sequentially propagates pieces of pattern data included in a second test pattern, according to a second test period that is different from the first test period, and outputs the resulting data to the device under test; a timing control section that controls at least one of a timing at which the first pipeline begins propagating a predetermined first pattern data and a timing at which the second pipeline begins propagating a predetermined second pattern data, based on the first test period and the second test period; and a judging section that judges pass/fail of the device under test based on a signal output by the device under test.
申请公布号 DE112007003424(T5) 申请公布日期 2010.01.21
申请号 DE20071103424T 申请日期 2007.03.27
申请人 ADVANTEST CORP. 发明人 KOBAYASHI, SHINICHI
分类号 G01R31/3183;G01R31/26;G01R31/3181;H01L21/66 主分类号 G01R31/3183
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