| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor capable of controlling leak vibration. <P>SOLUTION: Displacement parts B1, B2 are supported to be able to vibrate in a first direction, comprise vibration mass objects 1, 2 and detection mass objects 3, 4, and have a symmetry axis AX along the first direction in a plan view. The detection mass objects 3, 4 are supported by the vibration mass objects 1, 2 to be able to vibrate along a second direction perpendicular to the first direction. The vibration mass objects 1, 2 and the detection mass objects 3, 4 include a first region R1, second regions R2a, R2b. The symmetry axis AX passes through the first region R1 in the plan view. The second regions R2a, R2b are separated from each other in the second direction by the first region R1 in the plan view. The second regions R2a, R2b have a smaller average density than that of the first region R1. <P>COPYRIGHT: (C)2010,JPO&INPIT |
