| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultracompact inertial sensor and an inertial detector capable of highly accurate detection without requiring temperature compensation and also facilitating manufacturing processes. <P>SOLUTION: The inertial sensor includes a beam extending in a first direction in a plane in parallel with a principle plane of a substrate, held with a gap with the principle plane of a substrate, having a detection part, and having one end connected to the principle plane of the substrate; a weight connected to the other end of the beam and held with a gap with the principle plane of the substrate; and a lower-surface stopper part provided with a gap with the weight on the side of the weight opposite to the substrate. The detection part includes a first electrode; a second electrode; and a first piezoelectric film provided between the first electrode and the second electrode. <P>COPYRIGHT: (C)2010,JPO&INPIT |
