PROBE FOR SCANNING TYPE MAGNETIC FORCE MICROSCOPE, METHOD OF MANUFACTURING THE SAME AND METHOD OF FORMING FERROMAGNETIC ALLOY FILM FOR CARBON NANO-TUBE

摘要

PROBLEM TO BE SOLVED: To provide a probe for a scanning type magnetic force microscope having resolution enabling to observe a magnetic recording medium having recording density of≥1,200 kFCI, to provide a method of manufacturing the same, and to provide a method of forming a ferromagnetic alloy film for carbon nano-tube. SOLUTION: The probe for the scanning type magnetic force microscope includes at least a carbon nano-tube in which at least part of surface is covered with a ferromagnetic alloy metal layer consisting of one of a Co-Fe-based alloy and a Co-Ni-based alloy, wherein an arithmetic mean surface roughness (Ra 10μm) of the ferromagnetic alloy layer is restricted at≤1.15 nm. The method of manufacturing the probe for the scanning type magnetic force microscope achieves the above mean surface roughness by controlling the growth speed of the ferromagnetic alloy layer at within of 1.0-2.5 nm/min. The method of forming the ferromagnetic alloy film for the carbon nano-tube is also provided. COPYRIGHT: (C)2010,JPO&INPIT