| 摘要 |
<p>The present invention relates to a method for preparing cerium oxide (CeO2) by forming cerium nitrate hydrate (Ce(NO3)3 6H2O), which is an intermediate, through controlling acidity of cerium precursors. More specifically, the present invention provides fine cerium oxide powder, a preparation method thereof, and a CMP slurry containing the fine cerium oxide powder. The fine cerium oxide power has high crystallinity and improved polishing properties as the fine cerium oxide powder is prepared using, as an intermediate, cerium nitrate hydrate which has fine and uniform initial particles as a result of control of acidity of cerium precursors. The cerium precursors which are first precipitates are recovered by titrating sodium hydroxide in a cerium chloride composition and separating and filtering supernatants and precipitates, and cerium oxide is prepared by using cerium nitrate hydrate of which initial particles are finely crystallized by titrating nitric acids of a certain concentration so that the pH of the cerium precursors is 4-4.5.</p> |
