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发明名称
Waferhalter
摘要
申请公布号
DE10258368(B4)
申请公布日期
2010.01.21
申请号
DE20021058368
申请日期
2002.12.12
申请人
FORSCHUNGSZENTRUM JUELICH GMBH
发明人
MUELLER, JUERGEN
分类号
H01L21/687;H01L21/00;H01L21/68
主分类号
H01L21/687
代理机构
代理人
主权项
地址
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