| 摘要 |
PROBLEM TO BE SOLVED: To provide a diffraction performance measuring device suitable for precisely measuring the diffraction performance of a specimen, including a diffraction optical element. SOLUTION: One mode of this diffraction performance measuring device is equipped with: a light source 1 for emitting a light in a prescribed wavelength band; a spectral wavelength continuous variable type monochromator 10 for extracting light in a narrower wavelength band than the wavelength band from light emitted from the light source; a light projection part 25 for projecting light extracted by the monochromator to the specimen 27 including the diffraction optical element; and a detection part 26 for detecting intensity of diffracted light generated from the specimen, corresponding to the light projected by the projection part. COPYRIGHT: (C)2010,JPO&INPIT
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