发明名称 |
POSITIVE-TYPE RESIST COMPOSITION, AND METHOD FOR PRODUCTION OF MICROLENS |
摘要 |
Disclosed is a positive-type resist composition particularly for forming a microlens or a planarization film having excellent transparency, excellent heat resistance and an excellent refractive index. Also disclosed are a microlens and a planarization film each of which is formed from the positive-type resist composition. The positive-type resist composition comprises the following components (A), (B) and (C): (A) an alkali-soluble polymer which contains a unit structure having a biphenyl structure; (B) a compound having an organic group which can be photolyzed to produce an alkali-soluble group; and (C) a solvent. In the positive-type resist composition, the alkali-soluble polymer (A) contains a unit structure represented by formula (1), wherein the content ratio (n1) of the unit structure represented by formula (1) meets the requirement represented by the following formula: 0.3=n1=1.0 when the total number of unit structures constituting the polymer (A) is taken as 1.0. |
申请公布号 |
WO2010007915(A1) |
申请公布日期 |
2010.01.21 |
申请号 |
WO2009JP62379 |
申请日期 |
2009.07.07 |
申请人 |
NISSAN CHEMICAL INDUSTRIES, LTD.;YUKAWA, SHOJIRO;KISHIOKA, TAKAHIRO;SAKAGUCHI, TAKAHIRO;SODA, HIROYUKI |
发明人 |
YUKAWA, SHOJIRO;KISHIOKA, TAKAHIRO;SAKAGUCHI, TAKAHIRO;SODA, HIROYUKI |
分类号 |
G03F7/023;C08F12/32;G02B1/04;G02B3/00;G02F1/1333;G03F7/004 |
主分类号 |
G03F7/023 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|