| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To diagnose and predict a failure of a highly functional and complicated semiconductor manufacturing device in real time. <P>SOLUTION: A device data collection device 1 collects various device data from a semiconductor manufacturing device 6, and stores them in a database 5. When semiconductor manufacture processing is normally performed, a data analyzing/model creation tool 4 extracts trace data of a necessary section from the device data, and stores the statistical analysis result of the trace data as model data. A real time data collection device 2 collects in a real time the trace data of the section necessary for diagnosing/predicting a failure of the semiconductor manufacturing device from among the device data collected by the device data collection device. A real time device data monitoring device 3 statistically analyzes the trace data, and when the analysis result deviates from model data, decides that a failure has occurred in the processing of the semiconductor manufacturing device. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
