| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring apparatus capable of reducing the price of the apparatus while achieving efficient measurements. SOLUTION: The measuring apparatus includes: a probe unit 2 having probes 21a-21f; a scanner unit 16 for disconnecting first conductors 13a and 13b, second conductors 14a and 14b, third conductors 15a and 15b, and each of contact terminals 31a and 31b; and a control part 17 for controlling the scanner unit 16. After the control part 17 executes the connecting processing of serially connecting each of elements 101a-101c by controlling the scanner unit 16 and connecting each first contact terminal 31a of the probes 21b-21e to the third conductors 15a and 15b except two (probes 21a and 21f) among the probes 21a-21f each in contact with terminals 111a-111f of the elements 101a-101c, the control part 17 measures prescribed physical quantities on each of the elements 101a-101c. COPYRIGHT: (C)2010,JPO&INPIT |
