发明名称 MEASUREMENT METHOD, SPECTROSCOPIC ELLIPSOMETER, PROGRAM, AND MANUFACTURING APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide an organic EL element measurement method for executing higher level measurement of an organic EL element. Ž<P>SOLUTION: With an organic EL element emitting light, a light emission measuring means applies light to a sample from the translucent substrate side, to measure the polarized state of the light reflected by the sample. Further, with the EL element prevented from emitting a light, a non-light emission measuring means applies light to the sample from the translucent substrate side, to measure the polarized state of the light reflected by the sample. By fitting using a model, a light emission calculating means calculates an optical constant of a film based on the polarized state of the light measured by the light emission measuring means. Likewise, a non-light emission calculating means calculates the optical constant of the film, based on the polarized state of the light measured by the non-light emission measuring means. Finally, an output means outputs the difference or the ratio between the optical constants calculated by the light emission calculating means and by the non-light emission calculating means, respectively. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010014628(A) 申请公布日期 2010.01.21
申请号 JP20080176346 申请日期 2008.07.04
申请人 HORIBA LTD 发明人 NABATOVA-GABAIN NATALIA;WASAI YOKO
分类号 G01N21/21;G01M11/00 主分类号 G01N21/21
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