发明名称 DRIVE END-BLOCK FOR A ROTATABLE MAGNETRON
摘要 A drive end block for a magnetron arrangement with a rotating target, comprises an end block housing having a rotatably mounted drive shaft. The drive shaft is arranged in the end block housing, accessible at an end from outside of the end block housing for connection to the rotating target, and adapted at its end inside the end block housing for introduction of a torque. An electric motor with a stator and a rotor for creating the torque is arranged inside the end block housing.
申请公布号 US2010012487(A1) 申请公布日期 2010.01.21
申请号 US20090504776 申请日期 2009.07.17
申请人 VON ARDENNE ANLAGENTECHNIK GMBH 发明人 HEINRICH HANS-JUERGEN;HAEHNE SVEN
分类号 C23C14/35 主分类号 C23C14/35
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