OPTICAL WIRING STRUCTURE AND A PRODUCTION METHOD THEREFOR
摘要
The present invention relates to an optical wiring structure and a production method therefor, wherein the optical wiring structure comprises a silicon substrate with at least one lens-forming cavity having a radius of curvature on the top surface; and a silicon dioxide layer formed over the silicon substrate including the lens-forming cavity, to retain the shape of the lens-forming cavity. As most processes are carried out by semiconductor processing equipment, mass-production is possible and superior heat characteristics compared with conventional PCB substrates are attained.
申请公布号
WO2009131426(A3)
申请公布日期
2010.01.21
申请号
WO2009KR02191
申请日期
2009.04.27
申请人
GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY;LEE, YONG TAK;SONG, YOUNG MIN;MIN, EUNG KYEONG