| 摘要 |
<P>PROBLEM TO BE SOLVED: To specify a main spot from an electron beam diffraction image precisely to determine the position of the main spot and then measure a distance between spots. <P>SOLUTION: A group in which pixels brighter than a brightness threshold are adjacent to each other is determined from the electron beam diffraction image to be a spot. The center of gravity of brightness in each pixel group is set as a measurement reference position of the spot. The area of each spot is calculated and a spot with the largest area is determined as a main spot. A spot paired with the main spot is set as a diffraction spot. A distance between spots, a distance between lattice planes, and a scattering angle are calculated. <P>COPYRIGHT: (C)2010,JPO&INPIT |
